KLA-Tencor AIT XP
This piece of used equipment is surplus and is immediately available for purchase.Make:
KLA-Tencor
Model:
AIT XP
Vintage:
2002
Quantity:
1
Configuration and Description:
Darkfield Defect Inspection System
Configured for 200mm and 300mm Wafer Sizes
CE Marked
Install Type: Through-the-Wall
Status Lamp
Power Requirements: V 200-240, 3-Phase, 5-Wire, 50/60 Hz
Cassette Interface:
- Handler: 300DFF1P; Mfg: 12/01; Schematic: 0002461-000
- x1 300mm FOUP
- x1 200mm Open Cassette (Asyst VersaPort MOCA 2200)
VDB
- s/n: VDB000065
- Mfg: VDB0803
- 208VAC, 50/60Hz, 1-Phase, 3 Wire


