Metrology and Wafer Inspection Equipment

AXCELIS Fusion 200 PCU/POLO

AXCELIS Fusion 200 PCU/POLO

Make: 
AXCELIS Fusion
Model: 
2000 PCU/POLO
Configuration and Description: 

Configured for 8 in wafer sizes

ICOS WI-2000 Wafer Inspection System

ICOS WI-2000 Wafer Inspection System

Make: 
ICOS
Model: 
WI-2000 Wafer Inspection System
Vintage: 
2005
Configuration and Description: 

- Configured for 4” wafer
- With 2 ICOS HM-200 inspection handlers.

Rudolph NSX80

Make: 
Rudolph
Model: 
NSX 80
Vintage: 
2005
Configuration and Description: 

Rudolph NSX80 wafer inspection
Configured for 4” wafer.

KLA eV300

Make: 
KLA
Model: 
eV300
Vintage: 
Configuration and Description: 

AMAT Vera SEM

Make: 
AMAT
Model: 
Vera SEM

KLA Tencor UV1050

Make: 
KLA Tencor
Model: 
UV1050
Vintage: 
1999
Configuration and Description: 

In ECTRA warehouse.
For 8".

Starrett Profile Projector

Make: 
Starrett
Model: 
Profile Projector
Vintage: 
1997

KLA Tencor ES25-1

Make: 
KLA Tencor
Model: 
ES25-1
Configuration and Description: 

"For 8" and 12"
Crated

Lasertec RC-2001

Lasertec RC-2001

Make: 
Lasertec Corporation
Model: 
RC-2001
Vintage: 
2002
Configuration and Description: 

 

Leica INM 200

Leica INM 200

Make: 
Leica Inc.
Model: 
INM 200
Configuration and Description: 

 

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