Applied Materials SEMVision cX
Applied Materials SEMVision cX
Applied Materials SEMVision cX
Applied Materials SEMVision cX

Applied Materials SEMVision cX

This piece of used equipment is surplus and is immediately available for purchase.
  • Submit An Enquiry or email us at team@evensale.com
    • Make: 
    Applied Materials
    Model: 
    SEMVision cX
    Vintage: 
    2000
    Quantity: 
    1
    Category: 
    Metrology and Wafer Inspection Equipment
    Configuration and Description: 

     

    SEM - Defect Review (DR)
     
    Currently configured for 200mm wafers 
    Capable of running 150 & 200mm wafers
    Install Type: Stand-Alone
    CE Marked
     
    Cassette Interface:
    • (2) Open Cassette Stations
    • Genmark Wafer Handling Robot
     
    Main Unit:
    • Energy Dispersive X-Ray (EDX) option
    • Cryo Cool: Thermo-Noran Model TN-90-520
    • EDX Control Rack & Monitor
    • Turbo Pumps: Varian Turbo-V 300HT MacroTorr
    • Turbo Controller: Varian MultiVac
    • 360° Wafer Rotation
    • High Resolution SEM Column with up to 45° Tilt
    • Optical Microscope
    • Sony PowerHAD CCD
    • Status Lamp (R, Y, G, B, W)
    • BNC connections for Ext Video support
    •  SECS/GEM Port (RS-232)
    • Compatible Host for SECS II/GEM/HSMS
    • Ethernet Ports: (Hub, EDX, ISDN)
     
    Std EPDU Box
    Pump Vibration Dampener Block
     
    Facilities:
    • Power requirements: 208V (10kVA), 28A, 3-Phase (WYE), 5-wire, Freq 50/60Hz
    • Clean Dry Air (90-120 psig @ .9 scfm flow rate)
    • Compressed Air (100-120 psig @ 4 scfm flow rate)
    • N2 gas module (30-60 psig @ .5 scfm flow rate)
    • Cooling water (60-90 psig @ 1 scfm flow rate)