Applied Materials Centura ACP RP EPI
This piece of used equipment is surplus and is immediately available for purchase.Make:
Applied Materials
Model:
Centura ACP RP EPI
Vintage:
2006
Quantity:
1
Category:
Sputtering and Deposition Equipment
Configuration and Description:
Epitaxial Silicon (EPI)
Configured for 300mm wafers
Centura ACP mainframe
2x FOUP
Factory Interface (5.X)
• Yaskawa robot
• Wafer mapping
• Orient
• Ionizer
CH B – EPI 300
• Reduced Pressure (RP)
• Gasses (Unit 8560 MFCs)
CH D – EPI 300
• Reduced Pressure (RP)
• Gasses (Unit 8560 MFCs)