Applied Materials Centura 5200 DPS System
Applied Materials Centura 5200 DPS System
Applied Materials Centura 5200 DPS System
Applied Materials Centura 5200 DPS System
Applied Materials Centura 5200 DPS System

Applied Materials Centura 5200 DPS System

This piece of used equipment is surplus and is immediately available for purchase.
  • Submit An Enquiry or email us at team@evensale.com
    • Make: 
    Applied Materials
    Model: 
    Centura 5200 DPS
    Quantity: 
    8
    Configuration and Description: 

     

    PolySilicon Etch Equipment System
    Configured for 200 mm wafer sizes - (SNNF)- Single Notch No Flat
    Applied Materials 2 Chamber DPS R.1 Poly Etcher 
    Software Version : E3.7 
    Short Controller 
    Wide Body load locks - with Auto Rotation 
    Heated Loadlocks - with N2 purge 
    Wafer Mapping 
    Wafer on Blade Detector - Basic 
    Robot Type : HP+ 
    Monochromator Endpoint / HOT Pack Endpoint : ENDP30 Software 
    Secondary 4 Channel PCB 
    Chamber Position F : Orientor (OA) 
    Chamber Positions : A, B  - DPS Poly R.1 
    •  Electrostatic Chuck 
    •  Backside He Cooling 
    •  Slit Valve 
    •  RGA Port 
    •  Chamber Rough Line 
    •  Seiko Seiki Turbo Pumps : STP-A2203-PV 
    •  IEP 365 
    Neslab HX-150 for Cathode  
    Neslab Steel Head for Wall 
    AE : RF5S / RF20R RF Generators 
    Gas Panel and Gas Layout : 
    10 Gas Line positions per Pallet / Horizontal Purge Manifold 
    Valve Type : Veriflo 
    Filter Type : Millipore 
    Transducer Display Type : MKS 
    MFC Type : Unit 1661 
     
    Facility Lines/ Gas Lines : 
    Gas Panel Layout for Chambers A, B : 
    Position       Size      Gas  : 
    1              100       CL2 
    2              200       AR 
    3              20        O2 
    4              300       HBR 
    5              200       SF6 
    6              100       O2 
    7              20        N2 
    8              100       CF4 
    9              20        HE/O2 
    10             200       HE 
     
    Single Line Drop Feed, A/C, Bottom 
    Phase II 10ra Regulated - Facilities Type 
    Bottom Facilities Connection 
    Vacuum Pumps not included with Sale 
    Crated and Stored